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"A novel flexible capacitive micromachined ultrasonic transducer (CMUT) ..."

Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng (2013)

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DOI: 10.1109/NEMS.2013.6559874

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng:
A novel flexible capacitive micromachined ultrasonic transducer (CMUT) array with isolated metallic islands riveted to a polymer film. NEMS 2013: 923-926

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