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"Thermal switch and variable capacitance designed for micro electrostatic ..."

Jin-Chern Chiou et al. (2012)

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DOI: 10.1109/NEMS.2012.6196879

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jin-Chern Chiou, Lei-Chun Chou, You-Liang Lai, Sheng-Chieh Huang:
Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. NEMS 2012: 733-737

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