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"High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation ..."
Xuying Chen et al. (2018)
- Xuying Chen, Xinxin Liu, Tao Wang, Xianhao Le, Zhonggui Xu, Chengkuo Lee, Jin Xie:
High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes. NEMS 2018: 212-215
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