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"Dry mechanical liftoff technology for metallization on parylene-C using SU-8."

Jay Han-Chieh Chang, Dongyang Kang, Yu-Chong Tai (2012)

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DOI: 10.1109/NEMS.2012.6196776

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jay Han-Chieh Chang, Dongyang Kang, Yu-Chong Tai:
Dry mechanical liftoff technology for metallization on parylene-C using SU-8. NEMS 2012: 286-289

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