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"Wafer-scale nanostructure formation inside vertical nano-pores."

J. W. Berenschot et al. (2017)

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DOI: 10.1109/NEMS.2017.8016973

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-26

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  - conf/nems/BerenschotSTTBE17
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J. W. Berenschot, X. Sun, Hai Le The, R. M. Tiggelaar, M. J. de Boer, Jan C. T. Eijkel, J. G. E. Gardeniers, Niels R. Tas, Edin Sarajlic:
Wafer-scale nanostructure formation inside vertical nano-pores. NEMS 2017: 57-60

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