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"In-Plane Air Damping of NEMS and MEMS Resonators."

Nouha Alcheikh et al. (2018)

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DOI: 10.1109/NEMS.2018.8557020

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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  dblp key:
  - conf/nems/AlcheikhKKY18
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  - https://dblp.org/rec/conf/nems/AlcheikhKKY18
Nouha Alcheikh, Lakshmoji Kosuru, Syed N. R. Kazmi, Mohammad I. Younis:
In-Plane Air Damping of NEMS and MEMS Resonators. NEMS 2018: 225-228

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