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"3D profiling of thin film using contour analysis of interference fringe ..."

Hyun-Soo Kang, Jae-Won Suh, Yun-Ho Ko (2012)

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DOI: 10.1109/MWSCAS.2012.6292183

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-23

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Hyun-Soo Kang, Jae-Won Suh, Yun-Ho Ko:
3D profiling of thin film using contour analysis of interference fringe image and interpolation method. MWSCAS 2012: 968-971

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