"Micro-System Process for Education: Fabrication of a Pressure Sensor."

Laurent Montès et al. (2001)

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DOI: 10.1109/MSE.2001.932429

access: closed

type: Conference or Workshop Paper

metadata version: 2025-08-05

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Laurent Montès, Lionel Palun, Panagiota Morfouli, Nathalie Mathieu, Nadine Guillemot, Sandrine Descheneaux, Jean-Michel Terrot, Christophe Malhaire:
Micro-System Process for Education: Fabrication of a Pressure Sensor. MSE 2001: 91-

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