"Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial ..."

Jacek Nazdrowicz, Adam Stawinski, Andrzej Napieralski (2020)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2020-08-13

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Jacek Nazdrowicz, Adam Stawinski, Andrzej Napieralski:
Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure. MIXDES 2020: 151-155

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