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"Thermal decomposition of silicon-rich oxides deposited by the LPCVD method."
Davor Ristic et al. (2011)
- Davor Ristic, Mile Ivanda, Kresimir Furic, Alessandro Chiasera, Enrico Moser, Maurizio Ferrari:
Thermal decomposition of silicon-rich oxides deposited by the LPCVD method. MIPRO 2011: 25-26
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