"Frequency responses of on-chip pressure sensor with different deformation ..."

Chia-Hung Dylan Tsai, Makoto Kaneko (2015)

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DOI: 10.1109/MHS.2015.7438310

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Chia-Hung Dylan Tsai, Makoto Kaneko:
Frequency responses of on-chip pressure sensor with different deformation chambers. MHS 2015: 1-3

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