"Effect of intermitted RIE etching on the beta-PVDF film micro patterning."

Ryota Sugii, Hirofumi Miki, Shigeki Tsuchitani (2017)

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DOI: 10.1109/MHS.2017.8305170

access: closed

type: Conference or Workshop Paper

metadata version: 2018-03-08

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Ryota Sugii, Hirofumi Miki, Shigeki Tsuchitani:
Effect of intermitted RIE etching on the beta-PVDF film micro patterning. MHS 2017: 1-6

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