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"Vertical-objective-based ellipsometric microscope for backside illuminated ..."
Qingqing Liu et al. (2011)
- Qingqing Liu, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh:
Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films. MHS 2011: 51-54
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