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"Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film."

Kosuke Fujiwara, Hirotaka Hida, Isaku Kanno (2013)

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DOI: 10.1109/MHS.2013.6710466

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/mhs/FujiwaraHK13
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Kosuke Fujiwara, Hirotaka Hida, Isaku Kanno:
Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film. MHS 2013: 1-4

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