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"Anomaly detection for sensor data of semiconductor manufacturing equipment ..."

Miki Hashimoto, Yusuke Ide, Masayoshi Aritsugi (2021)

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DOI: 10.1016/J.PROCS.2021.08.090

access: open

type: Conference or Workshop Paper

metadata version: 2022-10-24

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  - conf/kes/HashimotoIA21
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Miki Hashimoto, Yusuke Ide, Masayoshi Aritsugi:
Anomaly detection for sensor data of semiconductor manufacturing equipment using a GAN. KES 2021: 873-882

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