"Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications."

Sven Schroder et al. (2015)

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DOI: 10.1109/IWASI.2015.7184978

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-07

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Sven Schroder, Ozgu Dogan, Jessica Schneidewind, Gabriel Bertotti, Stefan Keil, Hassan Gargouri, Michael Arens, Evelin Brose, Jürgen Bruns, Dirk Wolansky, Bernd Tillack, Stefano Vassanelli, Bernd Szyszka, Roland Thewes:
Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications. IWASI 2015: 21-24

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