"CAD-Driven High-Precision E-Beam Positioning."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Kent Kwang et al. (1993)

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DOI: 10.1109/TEST.1993.470607

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
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  persistent URL:
  - https://dblp.org/rec/conf/itc/KwangWHAN93
Kent Kwang, Hsin Wang, Arthur Hu, Mitsuyuki Asaki, Hironobu Niijima:
CAD-Driven High-Precision E-Beam Positioning. ITC 1993: 928-935

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