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"High-speed measurement of Piezoelectric MEMS equivalent circuit parameters ..."

Mitsuo Matsumoto, Masayuki Kawabata, Yukio Kawanabe (2021)

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DOI: 10.1109/ITC-ASIA53059.2021.9808524

access: closed

type: Conference or Workshop Paper

metadata version: 2022-07-15

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Mitsuo Matsumoto, Masayuki Kawabata, Yukio Kawanabe:
High-speed measurement of Piezoelectric MEMS equivalent circuit parameters by Swept-sine and PRBS signals. ITC-Asia 2021: 1-6

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