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"27.2 A1.2μg/√Hz-resolution 0.4μg-bias-instability MEMS ..."

Xi Wang et al. (2015)

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DOI: 10.1109/ISSCC.2015.7063133

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-03

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Xi Wang, Jian Zhao, Yang Zhao, Guo Ming Xia, An Ping Qiu, Yan Su, Yong Ping Xu:
27.2 A1.2μg/√Hz-resolution 0.4μg-bias-instability MEMS silicon oscillating accelerometer with CMOS readout circuit. ISSCC 2015: 1-3

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