"5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz ..."

Arthur Campos de Oliveira et al. (2021)

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DOI: 10.1109/ISSCC42613.2021.9365946

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-29

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Arthur Campos de Oliveira, Jarno Groenesteijn, Remco J. Wiegerink, Kofi A. A. Makinwa:
5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. ISSCC 2021: 84-86

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