"A Self-Resonant MEMS-based Electrostatic Field Sensor with 4V/m/Hz ..."

Tim Denison et al. (2006)

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DOI: 10.1109/ISSCC.2006.1696157

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-03

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Tim Denison, Jinbo Kuang, John S. Shafran, Michael Judy, Kent H. Lundberg:
A Self-Resonant MEMS-based Electrostatic Field Sensor with 4V/m/Hz Sensitivity. ISSCC 2006: 1121-1130

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