"Dummy feature placement for chemical-mechanical polishing uniformity in a ..."

Ruiqi Tian, Xiaoping Tang, D. F. Wong (2001)

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DOI: 10.1145/369691.369750

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Ruiqi Tian, Xiaoping Tang, D. F. Wong:
Dummy feature placement for chemical-mechanical polishing uniformity in a shallow trench isolation process. ISPD 2001: 118-123

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