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"Optical lithography extension with double patterning."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Shigeki Nojima (2013)

Trier

Dagstuhl

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DOI: 10.1145/2451916.2451936

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Shigeki Nojima:
Optical lithography extension with double patterning. ISPD 2013: 68

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last updated on 2018-11-06 11:07 CET by the dblp team

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