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"Design-aware lithography."

Shayak Banerjee, Kanak B. Agarwal, Sani R. Nassif (2012)

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DOI: 10.1145/2160916.2160920

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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  dblp key:
  - conf/ispd/BanerjeeAN12
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  - https://dblp.org/rec/conf/ispd/BanerjeeAN12
Shayak Banerjee, Kanak B. Agarwal, Sani R. Nassif:
Design-aware lithography. ISPD 2012: 3-8

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