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"Electrostatic actuation and control of micro robots using a post-processed ..."

Mustafa Emre Karagozler et al. (2011)

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DOI: 10.1109/ISCAS.2011.5938114

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Mustafa Emre Karagozler, Anil Thaker, Seth Copen Goldstein, David S. Ricketts:
Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip. ISCAS 2011: 2509-2512

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