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"Design, double sided post-processing, and packaging of CMOS compatible ..."
Jennifer Blain Christen et al. (2002)
- Jennifer Blain Christen, Cristina E. Davis, Min Li, Andreas G. Andreou:
Design, double sided post-processing, and packaging of CMOS compatible bio-MEMS device arrays. ISCAS (1) 2002: 665-668
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