"NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet ..."

Huimei Zhou et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9129023

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-28

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Huimei Zhou, Miaomiao Wang, Jingyun Zhang, Koji Watanabe, Curtis Durfee, Shogo Mochizuki, Ruqiang Bao, Richard G. Southwick, Maruf Bhuiyan, Basker Veeraraghavan:
NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor. IRPS 2020: 1-6

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