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"Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around ..."
Huimei Zhou et al. (2023)
- Huimei Zhou, Miaomiao Wang, Nicolas Loubet, Andrew Gaul, Yasir Sulehria:
Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around Nanosheet P-type Devices. IRPS 2023: 1-6
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