"BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand ..."

Betting Wehring et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9129285

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-20

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  dblp key:
  - conf/irps/WehringHGCUSBSM20
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  - https://dblp.org/rec/conf/irps/WehringHGCUSBSM20
Betting Wehring, Raik Hoffmann, Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, Christoph Leyens:
BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms. IRPS 2020: 1-5

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