"A Novel D2 Plasma Treatment for Defect Passivation: From Modeling to ..."

Sara Vecchi et al. (2025)

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DOI: 10.1109/IRPS48204.2025.10983832

access: closed

type: Conference or Workshop Paper

metadata version: 2025-06-04

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Sara Vecchi, Vikram Bhosle, Andrea Palmieri, Davide Cornigli, Fabrizio Buscemi, Andrea Padovani, Deven Raj, Andrew Cockburn, Lucien Date, Gaurav Thareja, Federico Nardi, Luca Larcher:
A Novel D2 Plasma Treatment for Defect Passivation: From Modeling to Process Optimization. IRPS 2025: 1-5

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