"An investigation of dielectric thickness scaling on BEOL TDDB."

Tian Shen et al. (2015)

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DOI: 10.1109/IRPS.2015.7112698

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  - conf/irps/ShenZYTYJ15
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Tian Shen, Wenyi Zhang, Kong Boon Yeap, Jing Tan, Walter Yao, Patrick Justison:
An investigation of dielectric thickness scaling on BEOL TDDB. IRPS 2015: 3

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