"A new technique for evaluating stacked nanosheet inner spacer TDDB ..."

Tian Shen et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9129258

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-28

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Tian Shen, Koji Watanabe, Huimei Zhou, Michael Belyansky, Erin Stuckert, Jingyun Zhang, Andrew Greene, Veeraraghavan S. Basker, Miaomiao Wang:
A new technique for evaluating stacked nanosheet inner spacer TDDB reliability. IRPS 2020: 1-5

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