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"BEOL tip-to-tip dielectric reliability characterization using a ..."

Y. Fang et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529311

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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  - conf/irps/FangLCRWVWC24
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Y. Fang, Alicja Lesniewska, Ivan Ciofi, Philippe Roussel, Chen Wu, Victor Vega-Gonzalez, Ingrid De Wolf, Kris Croes:
BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure. IRPS 2024: 1-7

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