"Failure analysis addressing method of optically undetected defectivity on ..."

Mario Santo Alessandrino et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764423

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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Mario Santo Alessandrino, Beatrice Carbone, Francesco Cordiano, Bruna Mazza, Alfio Russo, W. Coco, Massimo Boscaglia, A. Di Salvo, A. Lombardo, D. Scarcella, Elisa Vitanza, Patrick Fiorenza:
Failure analysis addressing method of optically undetected defectivity on 4H-SiC PowerMOSFET epitaxial layer. IRPS 2022: 61-1

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