"Motion Orchestration in Dual-Stage Wafer Scanners."

Yazan Mohammad Al-Rawashdeh, Marcel Heertjes, Mohammad Al Janaideh (2023)

> Home

Details and statistics

DOI: 10.1109/IROS55552.2023.10342526

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-05

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/iros/Al-RawashdehHJ23a
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/iros/Al-RawashdehHJ23a
Yazan Mohammad Al-Rawashdeh, Marcel Heertjes, Mohammad Al Janaideh:
Motion Orchestration in Dual-Stage Wafer Scanners. IROS 2023: 8304-8309

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.