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"An Automatic Calibration Method for Kerf Angle in Wafer Automated Optical ..."

Chao Meng et al. (2021)

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DOI: 10.1145/3469951.3469953

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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  dblp key:
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Chao Meng, Jinfei Shi, Fei Hao, Yuan Chao:
An Automatic Calibration Method for Kerf Angle in Wafer Automated Optical Inspection. IPMV 2021: 5-10

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