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"Detection of Defects on SiC Substrate by SEM and Classification Using Deep ..."

Shota Monno et al. (2018)

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DOI: 10.1007/978-3-319-98557-2_5

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-15

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  dblp key:
  - conf/incos/MonnoKMAK18
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  - https://dblp.org/rec/conf/incos/MonnoKMAK18
Shota Monno, Yoshifumi Kamada, Hiroyoshi Miwa, Koji Ashida, Tadaaki Kaneko:
Detection of Defects on SiC Substrate by SEM and Classification Using Deep Learning. INCoS 2018: 47-58

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