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"Computation of proximity effect corrections in electron beam lithography ..."

Robert C. Frye, Edward A. Rietman, Kevin D. Cummings (1990)

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DOI: 10.1109/IJCNN.1990.137536

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-29

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  dblp key:
  - conf/ijcnn/FryeRC90
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  - https://dblp.org/rec/conf/ijcnn/FryeRC90
Robert C. Frye, Edward A. Rietman, Kevin D. Cummings:
Computation of proximity effect corrections in electron beam lithography by a neural network. IJCNN 1990: 7-14

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