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"Precisely Assembled Multi Deflection Arrays - Key Components for Multi ..."
Matthias Mohaupt et al. (2012)
- Matthias Mohaupt, Erik Beckert, Thomas Burkhardt, Marcel Hornaff, Christoph Damm, Ramona Eberhardt, Andreas Tünnermann, Hans-Joachim Döring, Klaus Reimer:
Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. IPAS 2012: 42-50
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