"Precisely Assembled Multi Deflection Arrays - Key Components for Multi ..."

Matthias Mohaupt et al. (2012)

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DOI: 10.1007/978-3-642-28163-1_6

access: open

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Matthias Mohaupt, Erik Beckert, Thomas Burkhardt, Marcel Hornaff, Christoph Damm, Ramona Eberhardt, Andreas Tünnermann, Hans-Joachim Döring, Klaus Reimer:
Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. IPAS 2012: 42-50

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