"Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing."

Yilu Zhou et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325054

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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  - conf/ieeesensors/ZhouDSASVOLM23
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  - https://dblp.org/rec/conf/ieeesensors/ZhouDSASVOLM23
Yilu Zhou, James Dieffenderfer, Erdem Sennik, Mahaboobbatcha Aleem, Jakob Speight, Shrey Vasisht, Ömer Oralkan, Bongmook Lee, Veena Misra:
Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing. SENSORS 2023: 1-4

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