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"A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic ..."

Yonggang Yin et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325272

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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  dblp key:
  - conf/ieeesensors/YinRWGS23
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  - https://dblp.org/rec/conf/ieeesensors/YinRWGS23
Yonggang Yin, Danyang Ren, Yuqi Wang, Da Gao, Junhui Shi:
A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic Spectroscopy. SENSORS 2023: 1-4

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