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"A MEMS resonant tilt sensor with high sensitivity maintained in the whole ..."

Shudong Wang et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808792

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Shudong Wang, Juan Ren, Tianyi Zhang, Yinsheng Weng, Zhuangde Jiang, Xueyong Wei:
A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range. IEEE SENSORS 2016: 1-3

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