"A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor ..."

Tsung-Heng Tsai, Song-You Hong (2023)

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DOI: 10.1109/SENSORS56945.2023.10325313

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Tsung-Heng Tsai, Song-You Hong:
A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems. SENSORS 2023: 1-4

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