"Substrate-decoupled 3D micro-shell resonators."

Vahid Tavassoli, B. Hamelin, Farrokh Ayazi (2016)

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DOI: 10.1109/ICSENS.2016.7808779

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Vahid Tavassoli, B. Hamelin, Farrokh Ayazi:
Substrate-decoupled 3D micro-shell resonators. IEEE SENSORS 2016: 1-3

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