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"A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas ..."

Amin Sandoughsaz, Khalil Najafi, Luis P. Bernal (2016)

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DOI: 10.1109/ICSENS.2016.7808679

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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  - conf/ieeesensors/SandoughsazNB16
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  - https://dblp.org/rec/conf/ieeesensors/SandoughsazNB16
Amin Sandoughsaz, Khalil Najafi, Luis P. Bernal:
A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes. IEEE SENSORS 2016: 1-3

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