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"Laser ReSeal - Combination of Accelerometer and Gyroscope Sensors in a ..."
Holger Rumpf et al. (2020)
- Holger Rumpf, Jens Frey, Kurt-Ulrich Ritzau, Achim Breitling, Peter Staffeld, Mawuli Ametowobla:
Laser ReSeal - Combination of Accelerometer and Gyroscope Sensors in a Single MEMS Chip Silicon Wafer Processing Technology for Six Degrees of Freedom in Inertial Sensors. IEEE SENSORS 2020: 1-4
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