"Stiction Reduction in MEMS Fabrication via Naphthalene Sublimation."

Hamed Nikfarjam, Sepehr Sheikhlari, Siavash Pourkamali (2022)

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DOI: 10.1109/SENSORS52175.2022.9967274

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-25

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Hamed Nikfarjam, Sepehr Sheikhlari, Siavash Pourkamali:
Stiction Reduction in MEMS Fabrication via Naphthalene Sublimation. IEEE SENSORS 2022: 1-4

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