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"High aspect ratio spiral resonators for process variation investigation ..."

Luke M. Middelburg et al. (2017)

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DOI: 10.1109/ICSENS.2017.8233945

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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  - conf/ieeesensors/MiddelburgMZZP17
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  - https://dblp.org/rec/conf/ieeesensors/MiddelburgMZZP17
Luke M. Middelburg, Brahim El Mansouri, Henk W. van Zeijl, G. Q. Zhang, R. H. Poelma:
High aspect ratio spiral resonators for process variation investigation and MEMS applications. IEEE SENSORS 2017: 1-3

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