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"Piezoelectric scanning micromirror with built-in sensors based on thin ..."

Katja Meinel et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956929

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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  dblp key:
  - conf/ieeesensors/MeinelSMZFHO19
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  - https://dblp.org/rec/conf/ieeesensors/MeinelSMZFHO19
Katja Meinel, Chris Stoeckel, Marcel Melzer, Sven Zimmermann, Roman Forke, Karla Hiller, Thomas Otto:
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. IEEE SENSORS 2019: 1-4

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