"MEMS Gas Sensors with Metal-Oxide Semiconductor Materials Patterned at ..."

Xiaojiang Liu et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324896

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-01

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Xiaojiang Liu, Gaoqiang Niu, Jin Li, Yi Zhuang, Xitong Sun, Fei Wang:
MEMS Gas Sensors with Metal-Oxide Semiconductor Materials Patterned at Wafer-Level by Photolithography Technique. SENSORS 2023: 1-4

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